Name: Single-Zone Multi-Tube Diffusion System SDOM-3/100
SKU: 445979
Availability: InStock

Single-Zone Multi-Tube Diffusion System SDOM-3/100 — GKMP LLC

¥648,000 - ¥2,160,000 CNY

MOQ: 1 pieces

主要特点

Number of thermoelectric converters total per chamber: 6 pcs

Average service life: 6 year

Angle of rotation of the flap from the extreme positions: 60

Temperature at the inlet to the cooling system not more than: 25 °C

产品描述

System diffusion single-zone multi-tube model SDOM-3/100 is designed for automatic gas-thermal treatment of silicon wafers with a diameter of 50 ... 100 mm by diffusion and oxidation in the flow of vapour-gas mixture in the chamber of an open (direct-flow) quartz reactor in the production of semiconductor electronics products at temperatures from 600 ° C to 1200 ° C (briefly up to 1300 ° C).

Internal diameter of the heating chamber, mm-160;

Internal diameter of the heating element not less than 180 mm;

The length of the working heat zone is not less than 600 mm;

Time of heating up the electric furnace to the maximum working temperature not more than - 2 hours;

Working medium gaseous: argon, oxygen, nitrogen, - humidified oxygen (humidified nitrogen);

- temperature distribution error along the length of the working zone, not more, °? - ±1.0.

Average service life is not less than 6 years.

Overall dimensions DxWxH, mm not more: 4000x1030x2850;

Weight, kg, not more than 2200.