Deep Anisotropic Etching Vacuum System MVU TM PLASMA 06 | NIITM OJSC | Яклухт аз Русия
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Deep Anisotropic Etching Vacuum System MVU TM PLASMA 06

Deep Anisotropic Etching Vacuum System MVU TM PLASMA 06 — NIITM OJSC

Бренд: PLASMA
сом. 457,800 - сом. 1,635,000 TJS
MOQ: 1 pieces

Хусусиятҳои асосӣ

width: 1450 mm
length: 800 mm
height: 1520 mm

Тавсиф

Individual substrate processing in one process cycle:

Up to Ø 150 mm - 1 pc;

Measurement of RF displacement on RF electrode - substrate holder

in the range from 0 to 1000 V;

Regulation and automatic maintenance of power level

RF power level in the range from 30 to 200 W;

Regulation and automatic maintenance of power level

HF ICP plasma source in the range of 400 - 600 W;

Working gases: Ar, SF?, C?F?;

Oil-free pumping system;

Microprocessor control system;

Consumption power not more than 5.5 kW.

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