The unified platform of vacuum sputtering plants Saha is intended for creation of small-sized sputtering equipment. Plants built on this platform are used in laboratories and small-scale production.
The key feature of this platform is the placement of substrates and process devices inside the vacuum chamber, which greatly simplifies process maintenance and loading and unloading. This solution is realised by means of a cylindrical vacuum chamber of the cap type, moving vertically along its axis.
Advantages
-Full all-round access to sputtering devices and substrates.
-All elements of the vacuum system are made of non-magnetic stainless steel of 12X18N10T/AISI321, 08X18N10/ AISI304 grades.
-Surfaces facing the vacuum are machined to roughness Ra0,8, which guarantees minimum degassing and, as a consequence, reduced pumping time.
-The use of only "dry" vacuum pumps: spiral...
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